Characterization by APT and TEM of Xe nano-bubbles in CeO 2

Carine Perrin-Pellegrino (1) , Myriam Dumont (1) , Mohamed Fadel Keïta , Thomas Neisius , Georges Mikaelian (1) , Dominique Mangelinck (1) , Gaëlle Carlot , Philippe Maugis (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Only few experimental techniques are able to characterize the space and size distributions of gas-filled nano-cavities embedded in ceramic matrices. The aim of the current paper is to point out the potentiality of atom probe tomography for this objective. Nano-clusters enriched in Xe are evidenced in 3-D reconstructed volumes in Xe-implanted CeO2. Their size and density are comparable to bubble populations observed by TEM.

Mots clés: Defects; implantation; atom probe tomography; transmission electron microscopy

Domaines: Matériaux

Carine Perrin-Pellegrino, Myriam Dumont, Mohamed Fadel Keïta, Thomas Neisius, Georges Mikaelian, et al.. Characterization by APT and TEM of Xe nano-bubbles in CeO 2. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2020, 469, pp.24-27. ⟨10.1016/j.nimb.2020.02.032⟩. ⟨hal-03060510⟩