B. Voigtländer, Fundamental processes in Si/Si and Ge/Si epitaxy studied by scanning tunneling microscopy during growth, Surface Science Reports, vol.43, issue.5-8, pp.127-254, 2001.
DOI : 10.1016/S0167-5729(01)00012-7

C. Teichert, Self-organization of nanostructures in semiconductor heteroepitaxy, Physics Reports, vol.365, issue.5-6, pp.335-432, 2002.
DOI : 10.1016/S0370-1573(02)00009-1

I. Berbezier and A. Ronda, SiGe nanostructures, Surface Science Reports, vol.64, issue.2, pp.47-98, 2009.
DOI : 10.1016/j.surfrep.2008.09.003

URL : https://hal.archives-ouvertes.fr/hal-01238960

A. Portavoce, M. Kammler, R. Hull, M. Reuter, and F. M. Ross, Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces, Nanotechnology, vol.17, issue.17, pp.4451-4455, 2006.
DOI : 10.1088/0957-4484/17/17/028

F. Volpi, A. Portavoce, A. Ronda, Y. Shi, J. M. Gay et al., Nucleation and evolution of Si1???xGex islands on Si(001), Thin Solid Films, vol.380, issue.1-2, pp.46-50, 2000.
DOI : 10.1016/S0040-6090(00)01526-1

O. G. Schmidt, Lateral alignment of epitaxial quantum dots, 2007.

D. V. Regelman, V. Magidson, R. Beserman, and K. Dettmer, Composition and structure of Ge islands grown on Si(001) and of SiGe grown on Si mesa, Thin Solid Films, vol.336, issue.1-2, pp.73-75, 1998.
DOI : 10.1016/S0040-6090(98)01272-3

M. Floyd, Y. Zhang, K. P. Driver, J. Drucker, P. A. Crozier et al., Nanometer-scale composition measurements of Ge/Si(100) islands, Applied Physics Letters, vol.82, issue.9, pp.1473-1475, 2003.
DOI : 10.1063/1.1558215

U. Denker, H. Sigg, and O. G. Schmidt, Composition of self assembled Ge hut clusters, Materials Science and Engineering: B, vol.101, issue.1-3, pp.89-9410, 2003.
DOI : 10.1016/S0921-5107(02)00660-8

P. Sonnet and P. C. Kelires, Physical origin of trench formation in Ge???Si(100) islands, Applied Physics Letters, vol.85, issue.2, pp.203-205, 2004.
DOI : 10.1063/1.1771452

U. Denker, H. Sigg, and O. G. Schmidt, Intermixing in Ge hut cluster islands, Applied Surface Science, vol.224, issue.1-4, pp.127-133, 2004.
DOI : 10.1016/j.apsusc.2003.09.009

H. T. Chang, C. Lee, and S. W. Lee, The Compositional Distribution of Ge Islands Grown by Ultra-High Vacuum Chemical Vapor Deposition, Proceedings of the 218th Meeting of, 2010.

S. W. Lee, C. Lee, H. T. Chang, S. L. Cheng, and C. W. Liu, Evolution of composition distribution of Si-capped Ge islands on Si(001), Thin Solid Films, vol.517, issue.17, pp.5029-5032, 2009.
DOI : 10.1016/j.tsf.2009.03.041

G. Biasiol and S. Heun, Compositional mapping of semiconductor quantum dots and rings, Physics Reports, vol.500, issue.4-5, pp.117-173, 2011.
DOI : 10.1016/j.physrep.2010.12.001

M. K. Miller and R. G. Forbes, Atom Probe Tomography and the Local Electrode Atom Probe, Microscopy and Microanalysis, vol.10, issue.S02, 2014.
DOI : 10.1017/S1431927604881157

A. Portavoce, A. Ronda, and I. Berbezier, Sb-surfactant mediated growth of Ge nanostructures, Materials Science and Engineering: B, vol.89, issue.1-3, pp.205-21010, 2002.
DOI : 10.1016/S0921-5107(01)00853-4

F. K. Legoues, V. P. Kesan, S. S. Iyer, J. Tersoff, and R. Tromp, Surface-stress-induced order in SiGe alloy films, Physical Review Letters, vol.64, issue.17, pp.2038-2041, 1990.
DOI : 10.1103/PhysRevLett.64.2038