In situ synchrotron based investigation of grain kinetics and defects during silicon crystal growth

M.G. Tsoutsouva (1) , T. Riberi – Béridot (1) , G. Regula (1) , G. Reinhart (1) , J. Baruchel (2) , Nathalie Mangelinck-Noël (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ESRF - European Synchrotron Radiation Facility

Domaines: Matériaux

M.G. Tsoutsouva, T. Riberi – Béridot, G. Regula, G. Reinhart, J. Baruchel, et al.. In situ synchrotron based investigation of grain kinetics and defects during silicon crystal growth. EDS (Extended Defects in Semiconductors) 2016, Sep 2016, Les Issambres, France. ⟨hal-01452239⟩