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3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

A. Fraczkiewicz E. Capria G. Chahine P. Cloetens J. Da Silva A. Jouve F. Lorut S. Lhostis M.I. Richard 1 P. Bleuet
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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Conference papers
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https://hal-amu.archives-ouvertes.fr/hal-01453356
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Submitted on : Thursday, February 2, 2017 - 4:58:46 PM
Last modification on : Wednesday, November 3, 2021 - 7:28:20 AM

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  • HAL Id : hal-01453356, version 1

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UNIV-AMU | CNRS | UNIV-TLN | IM2NP

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A. Fraczkiewicz, E. Capria, G. Chahine, P. Cloetens, J. Da Silva, et al.. 3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines. X-Ray Microscopy Conference (XRM 2016), Aug 2016, Oxford, United Kingdom. ⟨hal-01453356⟩

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