3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

A. Fraczkiewicz; E. Capria; G. Chahine; P. Cloetens; J. Da Silva; A. Jouve; F. Lorut; S. Lhostis; M.I. Richard; P. Bleuet

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3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

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1

A. Fraczkiewicz

Function : Author

E. Capria

Function : Author

G. Chahine

Function : Author

P. Cloetens

Function : Author

J. Da Silva

Function : Author

A. Jouve

Function : Author

F. Lorut

Function : Author

S. Lhostis

Function : Author

M.I. Richard

Function : Author
PersonId : 736272
IdHAL : marie-ingrid-richard
ORCID : 0000-0002-8172-3141
IdRef : 130070289

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

CV

P. Bleuet

Function : Author

Domains

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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https://hal-amu.archives-ouvertes.fr/hal-01453356

Submitted on : Thursday, February 2, 2017-4:58:46 PM

Last modification on : Friday, March 24, 2023-2:53:03 PM

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hal-01453356 , version 1 (02-02-2017)

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HAL Id : hal-01453356 , version 1

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A. Fraczkiewicz, E. Capria, G. Chahine, P. Cloetens, J. Da Silva, et al.. 3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines. X-Ray Microscopy Conference (XRM 2016), Aug 2016, Oxford, United Kingdom. ⟨hal-01453356⟩

3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

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