Skip to Main content Skip to Navigation
New interface
Conference papers

3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

A. Fraczkiewicz E. Capria G. Chahine P. Cloetens J. Da Silva A. Jouve F. Lorut S. Lhostis M.I. Richard 1 P. Bleuet 
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
Document type :
Conference papers
Complete list of metadata
https://hal-amu.archives-ouvertes.fr/hal-01453356
Contributor : IM2NP Bibliométrie Connect in order to contact the contributor
Submitted on : Thursday, February 2, 2017 - 4:58:46 PM
Last modification on : Wednesday, November 3, 2021 - 7:28:20 AM

Identifiers

  • HAL Id : hal-01453356, version 1

Collections

UNIV-TLN | CNRS | UNIV-AMU | IM2NP

Citation

A. Fraczkiewicz, E. Capria, G. Chahine, P. Cloetens, J. Da Silva, et al.. 3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines. X-Ray Microscopy Conference (XRM 2016), Aug 2016, Oxford, United Kingdom. ⟨hal-01453356⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

94