An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition

M. H. Chu; L. Tian; A. Chaker; V. Cantelli; T. Ouled; R. Boichot; A. Crisci; S. Lay; M. I. Richard; O. Thomas; J.-L. Deschanvres; Hubert Renevier; D. D. Fong; G. Ciatto

Conference papers

An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition

M. H. Chu L. Tian A. Chaker V. Cantelli T. Ouled R. Boichot A. Crisci S. Lay M. I. Richard ¹ O. Thomas ¹ J.-L. Deschanvres Hubert Renevier D. D. Fong G. Ciatto

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal-amu.archives-ouvertes.fr/hal-01453370
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Submitted on : Thursday, February 2, 2017 - 5:05:48 PM
Last modification on : Wednesday, October 27, 2021 - 9:01:39 AM

An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition

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An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition

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