An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition

M. H. Chu , L. Tian , A. Chaker , V. Cantelli , T. Ouled , R. Boichot , A. Crisci , S. Lay , M. I. Richard (1) , O. Thomas (1) , J.-L. Deschanvres , Hubert Renevier , D. D. Fong , G. Ciatto

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Micro et nanotechnologies/Microélectronique

M. H. Chu, L. Tian, A. Chaker, V. Cantelli, T. Ouled, et al.. An atomistic view of the incipient growth of zinc oxide by in-situ x-ray absorption spectroscopy, Workshop on synchrotron radiation to study atomic layer deposition. Workshop on synchrotron radiation to study atomic layer deposition, Jun 2016, ALBA synchrotron, Barcelona, Spain. ⟨hal-01453370⟩