In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot; L. Tian; A. Claudel; E. Skopin; M.I. Richard; A. Crisci; A. Chaker; V. Cantelli; S. Coindeau; S. Lay; T. Ouled; C. Guichet; M. H. Chu; N. Aubert; G. Ciatto; E. Blanquet; O. Thomas; J.L. Deschanvres; D. D. Fong; Hubert Renevier

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In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot L. Tian A. Claudel E. Skopin M.I. Richard ¹ A. Crisci A. Chaker V. Cantelli S. Coindeau S. Lay T. Ouled C. Guichet M. H. Chu N. Aubert G. Ciatto E. Blanquet O. Thomas ¹ J.L. Deschanvres D. D. Fong Hubert Renevier

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

R. Boichot
Author

L. Tian
Author

A. Claudel
Author

E. Skopin
Author

M.I. Richard ¹
Author

A. Crisci
Author

A. Chaker
Author

V. Cantelli
Author

S. Coindeau
Author

S. Lay
Author

T. Ouled
Author

C. Guichet
Author

M. H. Chu
Author

N. Aubert
Author

G. Ciatto
Author

E. Blanquet
Author
PersonId : 739157
IdHAL : elisabeth-blanquetIdRef : 135652669

O. Thomas ¹
Author

J.L. Deschanvres
Author

D. D. Fong
Author

Hubert Renevier
Author

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (Faculté des Sciences Avenue Escadrille Normandie Niemen Case 142 13397 Marseille Cedex 20 - France) StructId : 199957

AMU - Aix Marseille Université : UMR7334 /UMR6242 (Aix-Marseille Université Jardins du Pharo 58 Boulevard Charles Livon 13284 Marseille cedex 7 - France) StructId : 198056
UTLN - Université de Toulon : UMR7334 /UMR6242 (Avenue de l'Université - BP 20132 - 83957 La Garde Cedex - France) StructId : 303091
CNRS - Centre National de la Recherche Scientifique : UMR7334 /UMR6242 (France) StructId : 441569

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Complete list of metadata

https://hal-amu.archives-ouvertes.fr/hal-01453376
Contributor : IM2NP Bibliométrie Connect in order to contact the contributor
Submitted on : Thursday, February 2, 2017 - 5:11:05 PM
Last modification on : Wednesday, November 3, 2021 - 7:27:31 AM

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HAL Id : hal-01453376, version 1

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UNIV-TLN | CNRS | UNIV-AMU | IM2NP

Citation

R. Boichot, L. Tian, A. Claudel, E. Skopin, M.I. Richard, et al.. In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition. Workshop on synchrotron radiation to study atomic layer deposition, Jun 2016, ALBA synchrotron, Barcelona, Spain. ⟨hal-01453376⟩

In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

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In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

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