In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition - Archive ouverte HAL Access content directly
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In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot
  • Function : Author
L. Tian
  • Function : Author
A. Claudel
  • Function : Author
E. Skopin
  • Function : Author
A. Crisci
  • Function : Author
A. Chaker
  • Function : Author
V. Cantelli
  • Function : Author
S. Coindeau
  • Function : Author
S. Lay
  • Function : Author
T. Ouled
  • Function : Author
C. Guichet
  • Function : Author
M. H. Chu
  • Function : Author
N. Aubert
  • Function : Author
G. Ciatto
  • Function : Author
E. Blanquet
J.L. Deschanvres
  • Function : Author
D. D. Fong
  • Function : Author
Hubert Renevier
  • Function : Author
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Dates and versions

hal-01453376 , version 1 (02-02-2017)

Identifiers

  • HAL Id : hal-01453376 , version 1

Cite

R. Boichot, L. Tian, A. Claudel, E. Skopin, M.I. Richard, et al.. In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition. Workshop on synchrotron radiation to study atomic layer deposition, Jun 2016, ALBA synchrotron, Barcelona, Spain. ⟨hal-01453376⟩
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