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In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

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https://hal-amu.archives-ouvertes.fr/hal-01453376
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Submitted on : Thursday, February 2, 2017 - 5:11:05 PM
Last modification on : Friday, May 3, 2019 - 11:42:01 AM

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  • HAL Id : hal-01453376, version 1

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R. Boichot, L. Tian, A. Claudel, E. Skopin, M.I. Richard, et al.. In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition. Workshop on synchrotron radiation to study atomic layer deposition, Jun 2016, ALBA synchrotron, Barcelona, Spain. ⟨hal-01453376⟩

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