In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot; L. Tian; A. Claudel; E. Skopin; M.I. Richard; A. Crisci; A. Chaker; V. Cantelli; S. Coindeau; S. Lay; T. Ouled; C. Guichet; M. H. Chu; N. Aubert; G. Ciatto; E. Blanquet; O. Thomas; J.L. Deschanvres; D. D. Fong; Hubert Renevier

Conference papers

In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot L. Tian A. Claudel E. Skopin M.I. Richard ¹ A. Crisci A. Chaker V. Cantelli S. Coindeau S. Lay T. Ouled C. Guichet M. H. Chu N. Aubert G. Ciatto E. Blanquet O. Thomas ¹ J.L. Deschanvres D. D. Fong Hubert Renevier

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Complete list of metadatas

https://hal-amu.archives-ouvertes.fr/hal-01453376
Contributor : Im2np Bibliométrie <>
Submitted on : Thursday, February 2, 2017 - 5:11:05 PM
Last modification on : Friday, May 3, 2019 - 11:42:01 AM

In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

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In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

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