In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition

R. Boichot , L. Tian , A. Claudel , E. Skopin , M.I. Richard (1) , A. Crisci , A. Chaker , V. Cantelli , S. Coindeau , S. Lay , T. Ouled , C. Guichet , M. H. Chu , N. Aubert , G. Ciatto , E. Blanquet , O. Thomas (1) , J.L. Deschanvres , D. D. Fong , Hubert Renevier

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Micro et nanotechnologies/Microélectronique

R. Boichot, L. Tian, A. Claudel, E. Skopin, M.I. Richard, et al.. In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition. Workshop on synchrotron radiation to study atomic layer deposition, Jun 2016, ALBA synchrotron, Barcelona, Spain. ⟨hal-01453376⟩