New strategies for producing strain engineered SiGe nanomembranes

T. David , Abdelmalek Benkouider , L. Kailang , J.N. Aqua , A. Rond , Luc Favre (1) , Marco Abbarchi , M. Naffouti , S. Fernandez , M.I. Richard (1) , O. Thomas (1) , Isabelle Berbezier (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

T. David, Abdelmalek Benkouider, L. Kailang, J.N. Aqua, A. Rond, et al.. New strategies for producing strain engineered SiGe nanomembranes. Journées Surfaces Interfaces, Jan 2016, Marseille, France. ⟨hal-01454799⟩