C. MocutaAuthorPersonId : 758731ORCID : 0000-0001-5540-449XIdRef : 200868470
M.-I. Richard 1Author
S. StanescuAuthor
A. BarbierAuthorPersonId : 17272 IdHAL : antoine-barbierORCID : 0000-0002-1032-299XIdRef : 138774110
J. FouetAuthor
C. GuichetAuthor
S. HustacheAuthor
D. ThiaudiereAuthor
A. DawiecAuthor
N. LeclercqAuthor
O. Thomas 1Author
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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