Strain distribution induced in SOI photonic substrate by TSVs, using advanced X- ray nano-diffraction

S. Escoubas (1) , B. Vianne , M.I. Richard (1) , V. Fiori , A. Farcy , O. Thomas (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Micro et nanotechnologies/Microélectronique

S. Escoubas, B. Vianne, M.I. Richard, V. Fiori, A. Farcy, et al.. Strain distribution induced in SOI photonic substrate by TSVs, using advanced X- ray nano-diffraction. Materials for Advanced Metallization, MAM 2016, Mar 2016, Brussels, Belgium. ⟨hal-01454828⟩