Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

Y. Ezzaidi; S. Escoubas; G. Gaudeau; D. Benoit; P. Morin; O. Thomas

Conference papers

Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

Y. Ezzaidi S. Escoubas ¹ G. Gaudeau D. Benoit P. Morin O. Thomas ¹

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal-amu.archives-ouvertes.fr/hal-01454833
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Submitted on : Friday, February 3, 2017 - 9:40:00 AM
Last modification on : Wednesday, November 3, 2021 - 7:28:36 AM

Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

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Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

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