Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

Y. Ezzaidi , S. Escoubas (1) , G. Gaudeau , D. Benoit , P. Morin , O. Thomas (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Micro et nanotechnologies/Microélectronique

Y. Ezzaidi, S. Escoubas, G. Gaudeau, D. Benoit, P. Morin, et al.. Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines. Advanced Metallization, MAM 2016, Mar 2016, Brussels, Belgium. ⟨hal-01454833⟩