Skip to Main content Skip to Navigation
Conference papers

Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

Complete list of metadata

https://hal-amu.archives-ouvertes.fr/hal-01454833
Contributor : IM2NP Bibliométrie Connect in order to contact the contributor
Submitted on : Friday, February 3, 2017 - 9:40:00 AM
Last modification on : Wednesday, November 3, 2021 - 7:28:36 AM

Identifiers

  • HAL Id : hal-01454833, version 1

Collections

Citation

Y. Ezzaidi, S. Escoubas, G. Gaudeau, D. Benoit, P. Morin, et al.. Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines. Advanced Metallization, MAM 2016, Mar 2016, Brussels, Belgium. ⟨hal-01454833⟩

Share

Metrics

Record views

48