Y. Ezzaidi, S. Escoubas, G. Gaudeau, D. Benoit, P. Morin, et al.. Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines.
Advanced Metallization, MAM 2016, Mar 2016, Brussels, Belgium.
⟨hal-01454833⟩