Effect of the temperature on the strain distribution induced in SOI photonic substrate by copper filled TSVs, using advanced scanning X-ray nano- diffraction

B. Vianne , S. Escoubas (1) , M.I. Richard (1) , V. Fiori , A. Farcy , O. Thomas (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

B. Vianne, S. Escoubas, M.I. Richard, V. Fiori, A. Farcy, et al.. Effect of the temperature on the strain distribution induced in SOI photonic substrate by copper filled TSVs, using advanced scanning X-ray nano- diffraction. 14th International Conference Reliability and Stress-Related Phenomena in Nanoelectronics–Experiment and Simulation, May 2016, Dresden, Germany. ⟨hal-01454838⟩