D. GaoAuthor
J. GaberleAuthor
A. ShlugerAuthor
A. AmrousAuthor
F. Bocquet 1Author
Franck Para 1AuthorPersonId : 18269 IdHAL : franck-paraORCID : 0000-0002-0295-0451IdRef : 253125057
Laurent Nony 1AuthorPersonId : 4894 IdHAL : laurent-nonyORCID : 0000-0002-9211-4237IdRef : 199386757
Ch. Loppacher 1Author
S. LamareAuthor
F. PalminoAuthor
F. CheriouxAuthor
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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