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Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes

A. Bravaix 1 F. Cacho X. Federspiel C. Ndiaye S. Mhira V. Huard
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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Conference papers
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https://hal-amu.archives-ouvertes.fr/hal-01463147
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Submitted on : Thursday, February 9, 2017 - 2:04:33 PM
Last modification on : Tuesday, October 19, 2021 - 11:00:00 PM

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  • HAL Id : hal-01463147, version 1

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UNIV-AMU | CNRS | UNIV-TLN | IM2NP

Citation

A. Bravaix, F. Cacho, X. Federspiel, C. Ndiaye, S. Mhira, et al.. Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes. 27th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2016), Sep 2016, Halle, Germany. ⟨hal-01463147⟩

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