Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes

A. Bravaix; F. Cacho; X. Federspiel; C. Ndiaye; S. Mhira; V. Huard

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Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes

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1

A. Bravaix

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

F. Cacho

Function : Author

X. Federspiel

Function : Author

C. Ndiaye

Function : Author

S. Mhira

Function : Author

V. Huard

Function : Author

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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https://hal-amu.archives-ouvertes.fr/hal-01463147

Submitted on : Thursday, February 9, 2017-2:04:33 PM

Last modification on : Friday, March 24, 2023-2:53:03 PM

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hal-01463147 , version 1 (09-02-2017)

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HAL Id : hal-01463147 , version 1

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A. Bravaix, F. Cacho, X. Federspiel, C. Ndiaye, S. Mhira, et al.. Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes. 27th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2016), Sep 2016, Halle, Germany. ⟨hal-01463147⟩

Potentiality of Healing Techniques in Hot-Carrier Damaged 28nm FDSOI CMOS nodes

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