Thi Bich Lien Nguyen, Mohand Djeziri, Faris Djohor, Bouchra Ananou, Mustapha Ouladsine, et al.. Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing.
Journal of Process Control, Elsevier, 2016, Volume 48 (December 2016), pp.Pages 72-80.
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