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Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing

Thi Bich Lien Nguyen Mohand Djeziri Faris Djohor 1 Bouchra Ananou 1 Mustapha Ouladsine 1 Jacques Pinaton 2 
1 LSIS - Laboratoire des Sciences de l'Information et des Systèmes
2 ST-ROUSSET - STMicroelectronics [Rousset]
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https://hal-amu.archives-ouvertes.fr/hal-01479265
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Submitted on : Tuesday, February 28, 2017 - 5:08:39 PM
Last modification on : Wednesday, November 3, 2021 - 9:37:48 AM

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  • HAL Id : hal-01479265, version 1

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Thi Bich Lien Nguyen, Mohand Djeziri, Faris Djohor, Bouchra Ananou, Mustapha Ouladsine, et al.. Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing. Journal of Process Control, Elsevier, 2016, Volume 48 (December 2016), pp.Pages 72-80. ⟨hal-01479265⟩

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