Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing - Archive ouverte HAL Access content directly
Journal Articles Journal of Process Control Year : 2016

Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing

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Computer Science [cs] Systems and Control [cs.SY]

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https://hal-amu.archives-ouvertes.fr/hal-01479265

Submitted on : Tuesday, February 28, 2017-5:08:39 PM

Last modification on : Friday, March 24, 2023-2:53:04 PM

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hal-01479265 , version 1 (28-02-2017)

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  • HAL Id : hal-01479265 , version 1

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Thi Bich Lien Nguyen, Mohand Djeziri, Faris Djohor, Bouchra Ananou, Mustapha Ouladsine, et al.. Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing. Journal of Process Control, 2016, Volume 48 (December 2016), pp.Pages 72-80. ⟨hal-01479265⟩

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