Virtual metrology on chemical mechanical planarization process based on Just-in-time learning

Mohamed Jebri Guillaume Graton 1 El Adel Mustapha Ouladsine 2 Jacques Pinaton 3
1 LVR - Laboratoire Vision et Robotique
2 LSIS - Laboratoire des Sciences de l'Information et des Systèmes
3 ST-ROUSSET - STMicroelectronics [Rousset]
Abstract : no abstract
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Conference papers
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https://hal-amu.archives-ouvertes.fr/hal-01490124
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, March 14, 2017 - 10:24:14 PM
Last modification on : Wednesday, September 12, 2018 - 1:27:04 AM

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Mohamed Jebri, Guillaume Graton, El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology on chemical mechanical planarization process based on Just-in-time learning. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490124⟩

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