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Conference Papers Year : 2016

Virtual metrology on chemical mechanical planarization process based on Just-in-time learning

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hal-01490124 , version 1 (14-03-2017)

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  • HAL Id : hal-01490124 , version 1

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Mohamed Ali Jebri, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology on chemical mechanical planarization process based on Just-in-time learning. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490124⟩
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