Virtual metrology on chemical mechanical planarization process based on Just-in-time learning - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Virtual metrology on chemical mechanical planarization process based on Just-in-time learning

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Mohamed Ali Jebri
  • Function : Author
Guillaume Graton
  • Function : Author
Laboratoire Vision et Robotique
El Mostafa El Adel
  • Function : Author
Mustapha Ouladsine
  • Function : Author
  • PersonId : 756299
  • IdRef : 092724515
Laboratoire des Sciences de l'Information et des Systèmes
Jacques Pinaton
  • Function : Author
STMicroelectronics [Rousset]

Abstract

no abstract

Domains

Computer Science [cs] Computer Science [cs] Automatic Control Engineering Computer Science [cs] Signal and Image Processing

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https://hal-amu.archives-ouvertes.fr/hal-01490124

Submitted on : Tuesday, March 14, 2017-10:24:14 PM

Last modification on : Saturday, June 25, 2022-10:12:53 AM

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hal-01490124 , version 1 (14-03-2017)

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  • HAL Id : hal-01490124 , version 1

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Mohamed Ali Jebri, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology on chemical mechanical planarization process based on Just-in-time learning. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490124⟩

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