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Virtual metrology on chemical mechanical planarization process based on Just-in-time learning

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https://hal-amu.archives-ouvertes.fr/hal-01490124
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Submitted on : Tuesday, March 14, 2017 - 10:24:14 PM
Last modification on : Wednesday, November 3, 2021 - 4:07:28 AM

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  • HAL Id : hal-01490124, version 1

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Mohamed Jebri, Guillaume Graton, El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology on chemical mechanical planarization process based on Just-in-time learning. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490124⟩

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