Run To Run control based on categorical output in semiconductor manufacturing

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https://hal-amu.archives-ouvertes.fr/hal-01490125
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, March 14, 2017 - 10:24:15 PM
Last modification on : Wednesday, September 12, 2018 - 1:27:52 AM

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  • HAL Id : hal-01490125, version 1

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El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Run To Run control based on categorical output in semiconductor manufacturing. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490125⟩

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