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Run To Run control based on categorical output in semiconductor manufacturing

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https://hal-amu.archives-ouvertes.fr/hal-01490125
Contributor : William Domingues Vinhas Connect in order to contact the contributor
Submitted on : Tuesday, March 14, 2017 - 10:24:15 PM
Last modification on : Saturday, June 25, 2022 - 10:12:53 AM

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  • HAL Id : hal-01490125, version 1

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El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Run To Run control based on categorical output in semiconductor manufacturing. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490125⟩

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