Run To Run control based on categorical output in semiconductor manufacturing
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Conference Papers
Year : 2016
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https://hal-amu.archives-ouvertes.fr/hal-01490125
Submitted on : Tuesday, March 14, 2017-10:24:15 PM
Last modification on : Wednesday, February 8, 2023-5:11:01 PM
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- HAL Id : hal-01490125 , version 1
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El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Run To Run control based on categorical output in semiconductor manufacturing. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490125⟩
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