Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning

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https://hal-amu.archives-ouvertes.fr/hal-01490128
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, March 14, 2017 - 10:24:19 PM
Last modification on : Wednesday, September 12, 2018 - 1:27:52 AM

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  • HAL Id : hal-01490128, version 1

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Mohamed Jebri, Guillaume Graton, El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning. 8th IFAC Conference on Manufacturing Modelling, Management and Control, 2016, Troyes, Unknown Region. ⟨hal-01490128⟩

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