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Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning

Mohamed Jebri Guillaume Graton 1 El Adel Mustapha Ouladsine 2 Jacques Pinaton 3
1 LVR - Laboratoire Vision et Robotique
2 LSIS - Laboratoire des Sciences de l'Information et des Systèmes
3 ST-ROUSSET - STMicroelectronics [Rousset]
Abstract : no abstract
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Conference papers
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https://hal-amu.archives-ouvertes.fr/hal-01490128
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, March 14, 2017 - 10:24:19 PM
Last modification on : Monday, March 30, 2020 - 8:44:57 AM

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  • HAL Id : hal-01490128, version 1

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LSIS | UNIV-AMU | CNRS | UNIV-TLN | UNIV-ORLEANS | LIS-LAB | UNIV-HESAM | ARTS-ET-METIERS-SCIENCES-ET-TECHNOLOGIES

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Mohamed Jebri, Guillaume Graton, El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning. 8th IFAC Conference on Manufacturing Modelling, Management and Control, 2016, Troyes, Unknown Region. ⟨hal-01490128⟩

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