Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning

Mohamed Ali Jebri
  • Function : Author
Guillaume Graton
  • Function : Author
Laboratoire Vision et Robotique
El Mostafa El Adel
  • Function : Author
Mustapha Ouladsine
  • Function : Author
  • PersonId : 756299
  • IdRef : 092724515
Laboratoire des Sciences de l'Information et des Systèmes
Jacques Pinaton
  • Function : Author
STMicroelectronics [Rousset]

Abstract

no abstract

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Computer Science [cs] Computer Science [cs] Automatic Control Engineering Computer Science [cs] Signal and Image Processing

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https://hal-amu.archives-ouvertes.fr/hal-01490128

Submitted on : Tuesday, March 14, 2017-10:24:19 PM

Last modification on : Wednesday, February 8, 2023-5:11:01 PM

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hal-01490128 , version 1 (14-03-2017)

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  • HAL Id : hal-01490128 , version 1

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Mohamed Ali Jebri, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning. 8th IFAC Conference on Manufacturing Modelling, Management and Control, 2016, Troyes, Unknown Region. ⟨hal-01490128⟩

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