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Communication Dans Un Congrès Année : 2016

Virtual metrology based on relevant features extraction and Just-In-Time Learning approach

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hal-01490129 , version 1 (14-03-2017)

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  • HAL Id : hal-01490129 , version 1

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Mohamed Ali Jebri, El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology based on relevant features extraction and Just-In-Time Learning approach. Advanced Process Control at the 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2016), 2016, New-York, Unknown Region. ⟨hal-01490129⟩
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