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Regression methods for predicting the product's quality in the semiconductor manufacturing process

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https://hal-amu.archives-ouvertes.fr/hal-01490154
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Submitted on : Tuesday, March 14, 2017 - 10:24:53 PM
Last modification on : Wednesday, November 3, 2021 - 9:43:22 AM

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  • HAL Id : hal-01490154, version 1

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Mariam Melhem, Bouchra Ananou, Mustapha Ouladsine, Jacques Pinaton. Regression methods for predicting the product's quality in the semiconductor manufacturing process. 8th IFAC Conference on Manufacturing Modelling, Management., 2016, Troyes, Unknown Region. ⟨hal-01490154⟩

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