Fabrication of nanostructures for photonic applications

Abstract : The goal of this poster presentation is to give an overview of nanofabrication technics commonly used for realization of nanostructures in our micro and nanofabrication facilities. We focus on process equipment available in the CINaM clean room. We will also discuss some new scientific results obtained on plasmonics nanoarrays for molecular sensing and on silicon structures showing Mie scattering resonances in the visible and near infrared spectral regions. All nanostructures were obtained in our clean room facilities using nanofabrication tools such as electron beam lithography, magnetron sputtering or thermal evaporation and chemical or reactive ion etching.
Type de document :
Communication dans un congrès
CNRS-EWHA Winter School (Advanced Materials), Jan 2016, Seoul, South Korea. pp.37, 2016
Liste complète des métadonnées

https://hal-amu.archives-ouvertes.fr/hal-01613285
Contributeur : Igor Ozerov <>
Soumis le : vendredi 13 octobre 2017 - 08:40:59
Dernière modification le : jeudi 18 janvier 2018 - 02:25:45

Identifiants

  • HAL Id : hal-01613285, version 1

Collections

Citation

Igor Ozerov, Frédéric Bedu. Fabrication of nanostructures for photonic applications. CNRS-EWHA Winter School (Advanced Materials), Jan 2016, Seoul, South Korea. pp.37, 2016. 〈hal-01613285〉

Partager

Métriques

Consultations de la notice

37