Nanofabrication of optical structures (filters, resonators and sensors)

Frédéric Bedu (1) , Nicolas Bonod (2) , Mireille Commandre (3) , Benjamin Demirdjian (1) , Claude Henry (1) , Artak Karapetyan (1) , Igor Ozerov (1) , Julien Proust (4, 2) , Alain Ranguis (5) , Benjamin Vial (6, 7)

1 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille
2 CLARTE - CLARTE
3 FRESNEL - Institut FRESNEL
4 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
5 AMU - Aix Marseille Université
6 MAP2
7 SILIOS - SILIOS Technologies

We fabricated and characterized three types of nanostructures for photonic applications. Gold structures were used for light filtering in the infrared spectral region as well as for molecular sensing based on nanoplasmonics. Also, we fabricated silicon nanostructures showing Mie scattering resonances in the visible and near infrared spectral regions using alkaline etching and gold structures as mask. For all structures, we compare the experimental results vs theoretical modeling.  INTRODUCTION Nanostructuring of metallic and dielectric surfaces at subwavelength scale can result in spectacular resonant effects. Such structures have recently attracted considerable attention because of their potential applications in integrated photonic components. First, we show the applications of gold structures for light filtering in the infrared spectral region. Second, we apply gold nanoplasmonic arrays for molecular sensing and interaction studies. Third, we fabricated silicon nanostructures featuring Mie scattering resonances in the visible and near infrared spectral regions using gold structures as mask. We will give a comparison between modeling and experiments, mostly obtained by optical spectroscopy. All nanostructures were obtained in our clean room facilities using nanofabrication tools such as electron beam lithography, magnetron sputtering or thermal evaporation and chemical or reactive ion etching.  REALISATION A. Infrared filter. Infrared filters are based on square annular aperture arrays (AAAs) in a thin gold film (Fig. 1). The optical properties of the filters depend on interior and exterior widths of apertures [1,2]. We tuned the central wavelength of the filter transmission in the range of 7–12 μm, by varying the aperture width and pitch. The results of the Finite Element Method (FEM) simulations are summarized in table 1 and shown in fig 1a. The geometry of the features is shown in the inset of fig. 1a. Filter Λr, µm d, nm w1, nm w2, nm M1

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Optique [physics.optics]

Frédéric Bedu, Nicolas Bonod, Mireille Commandre, Benjamin Demirdjian, Claude Henry, et al.. Nanofabrication of optical structures (filters, resonators and sensors). 4èmes Journees Nationales sur les Technologies Emergentes en Micronanofabrication, Nov 2015, Ecully, France. ⟨hal-01613314⟩