Ozone Sensors Working at Room Temperature Using Zinc Oxide Nanocrystals Annealed at Low Temperature

Sandrine Bernardini (1) , Mohamed Hameda Benchekroun , Tomas Fiorido (2) , Khalifa Aguir (1) , Marc Bendahan (1) , Sadok Ben Dkhil , Meriem Gaceur (3) , Jörg Ackermann (3) , Olivier Margeat (3) , Christine Videlot-Ackermann (3)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 LMI - Laboratoire des Multimatériaux et Interfaces
3 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille

We focus on ozone (O3) detection at ambient temperature by Zinc Oxide (ZnO) nanoparticles (NPs) deposited on Si/SiO2 by spin coating from colloidal solutions as sensitive layers for air quality monitoring. We establish that at room temperature using continuous Ultra-Violet (UV) light irradiation enhances the sensing responses. Three annealing temperatures of ZnO films were performed to compare the sensing properties. These sensors present repeatable responses towards O3 with fast responses for concentrations as low as 35 ppb with processes compatible with most of flexible substrates.

Keywords: ZnO nanoparticles; environment; ozone gas; room-temperature; UV-photoactivated

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Sandrine Bernardini, Mohamed Hameda Benchekroun, Tomas Fiorido, Khalifa Aguir, Marc Bendahan, et al.. Ozone Sensors Working at Room Temperature Using Zinc Oxide Nanocrystals Annealed at Low Temperature. Eurosensors XXXI confrence, Sep 2017, Paris, France. pp.3 - 6, ⟨10.3390/proceedings1040423⟩. ⟨hal-01631576⟩