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Journal Articles Journal of Electronic Materials Year : 2017

Evaluation of Alternative Atomistic Models for the Incipient Growth of ZnO by Atomic Layer Deposition

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hal-01705058 , version 1 (09-02-2018)

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Manh-Hung Chu, Liang Tian, Ahmad Chaker, Evgenii Skopin, Valentina Cantelli, et al.. Evaluation of Alternative Atomistic Models for the Incipient Growth of ZnO by Atomic Layer Deposition. Journal of Electronic Materials, 2017, 46 (6), pp.3512 - 3517. ⟨10.1007/s11664-017-5448-2⟩. ⟨hal-01705058⟩
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