P. Sarrazin AuthorId : 287641 Author
P. Walter AuthorId : 9040 Author
M. Gailhanou 1 AuthorId : 50118 Author IdHAL : marc-gailhanou ORCID : https://orcid.org/0000-0002-7747-703X
D. Blake AuthorId : 197948 Author
D. Hérouard AuthorId : 11192890 Author
A. Verney AuthorId : 872757 Author
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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