Study of the microstructure and stress induced during the crystallization of GeTe thin films

M. Gallard; M.S. Amara; F. Lauraux; C. Guichet; S. Escoubas; M.-I. Richard; C. Mocuta; P. Noé; C. Sabbione; F. Hippert; Magali Putero; N. Burle; O. Thomas

Conference Papers Year :

Study of the microstructure and stress induced during the crystallization of GeTe thin films

, , , , (1) , (1) , , , , , (1) , , (1)

1

M. Gallard

Function : Author

M.S. Amara

Function : Author

F. Lauraux

Function : Author

C. Guichet

Function : Author

S. Escoubas

Function : Author
PersonId : 19476
IdHAL : stephanie-escoubas
ORCID : 0000-0001-9436-0055
IdRef : 220600821

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

M.-I. Richard

Function : Author
PersonId : 736272
IdHAL : marie-ingrid-richard
ORCID : 0000-0002-8172-3141
IdRef : 130070289

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

CV

C. Mocuta

Function : Author
PersonId : 758731
ORCID : 0000-0001-5540-449X
IdRef : 200868470

P. Noé

Function : Author

C. Sabbione

Function : Author

F. Hippert

Function : Author

Magali Putero

Function : Author
PersonId : 170674
IdHAL : magali-putero
ORCID : 0000-0001-6527-4334
IdRef : 231973950

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

N. Burle

Function : Author

O. Thomas

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

IM2NP Bibliométrie : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-01781812

Submitted on : Monday, April 30, 2018-5:19:31 PM

Last modification on : Wednesday, February 8, 2023-5:11:04 PM

Dates and versions

hal-01781812 , version 1 (30-04-2018)

Identifiers

HAL Id : hal-01781812 , version 1

Cite

M. Gallard, M.S. Amara, F. Lauraux, C. Guichet, S. Escoubas, et al.. Study of the microstructure and stress induced during the crystallization of GeTe thin films. E/PCOS 2017, European Phase Change and Ovonics Symposium, Sep 2017, Aachen, Germany. ⟨hal-01781812⟩

Study of the microstructure and stress induced during the crystallization of GeTe thin films

Domains

Dates and versions

Identifiers

Cite

Export

Collections

Share