B. LawsonAuthor
V. LaithierAuthorPersonId : 171988 IdHAL : virginie-laithier
T. Fiorido 1Author
F. AnnanouchAuthor
Stéphane BurteyAuthorPersonId : 183685 IdHAL : stephane-burteyIdRef : 111036372
C. Cassé-PerrotAuthor
Ch. AudebertAuthor
Marc Bendahan 1AuthorPersonId : 18209 IdHAL : marc-bendahanIdRef : 074292633
R. Bouchakour 1Author
O. BlinAuthor
Khalifa Aguir 1AuthorPersonId : 19327 IdHAL : khalifa-aguirORCID : 0000-0001-8491-4843IdRef : 031890067
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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