Particle Fallout in a Class 100,000 High-Bay Aerospace Cleanroom, Journal of IES, vol.38, issue.2, pp.15-17, 1995. ,
Experimental Study of Particle Deposition on Semiconductor Wafers, Aerosol Science and Technology, vol.9, issue.4, pp.795-804, 1990. ,
DOI : 10.1016/0021-8502(89)90074-8
Deposition of submicron aerosol particles during integrated circuit manufacturing: experiments, The Journal of Environmental Sciences, pp.27-28, 1989. ,
A Forecasting Technique for Accumulated Particulate Contamination of Spacecraft Assemblies, 1970. ,
Evaluation of Particulate Contamination for Unmanned Spacecraft Prelaunch Operations, J. Envir. Sci, p.29, 1975. ,
Particle Deposition onto a Flat Surface from a Point Particle Source, Journal of IES, vol.311, pp.39-41, 1988. ,
Particulate Fallout Predictions for Clean Rooms, J. Envir. Sai., XXV, issue.3, p.15, 1982. ,
Particle Deposition on Semiconductor Wafers, Aerosol Science and Technology, vol.92, issue.3, pp.215-224, 1987. ,
DOI : 10.1115/1.3247417
URL : http://www.tandfonline.com/doi/pdf/10.1080/02786828708959135?needAccess=true
Particle size distribution on Surfaces in Cleanrooms Aerospace Corporation, El Segundo and Proc, pp.14-19, 1984. ,
Practical experiences in practical deposition monitoring, Clean Air and Containment Review, vol.21, pp.4-8, 2015. ,
Real-time Particle Deposition Monitoring of Operational Cleanroom Quality, Journal of the IEST, vol.59, issue.1, pp.1-13, 2016. ,
DOI : 10.17764/1098-4321.59.1.40
Aerosol and deposited particle measurements in Laser MegaJoule, 2015. ,