Self-assembled anti-reflection coatings for light trapping based on SiGe random metasurfaces - Archive ouverte HAL Access content directly
Journal Articles Physical Review Materials Year : 2018

Self-assembled anti-reflection coatings for light trapping based on SiGe random metasurfaces

(1) , (2) , , (3) , (3) , , (3) , (4) , (4) , (3) , (5) , (6) , (1) , (3) , , (3) , (3) , , (7) , (3)
1
2
3
4
5
6
7
Thomas Wood
Kailang Liu
  • Function : Author
David Duché
  • Function : Author
  • PersonId : 949094
  • IdHAL : david-duche
Judikaël Le Rouzo
Gérard Berginc
Nicolas Bonod
Leo Metayer
  • Function : Author
David Grosso
  • Function : Author
  • PersonId : 977521

Abstract

We demonstrate a simple self-assembly method based on solid state dewetting of ultra-thin silicon films and germanium deposition for the fabrication of efficient anti reflection coatings on silicon for light trapping. Via solid state dewetting of ultra-thin silicon on insulator and epitaxial deposition of Ge we fabricate SiGe islands with a high surface density, randomly positioned and broadly varied in size. This allows to reduce the reflectance to low values in a broad spectral range (from 500 nm to 2500 nm) and a broad angle (up to 55 degrees) and to trap within the wafer a large portion of the impinging light (∼40%) also below the band-gap, where the Si substrate is non-absorbing. Theoretical simulations agree with the experimental results showing that the efficient light coupling into the substrate mediated by Mie resonances formed within the SiGe islands. This lithography-free method can be implemented on arbitrarily thick or thin SiO2 layers and its duration only depends on the sample thickness and on the annealing temperature.
Fichier principal
Vignette du fichier
SiGe_ARC_resub.pdf (1.62 Mo) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-01788964 , version 1 (09-05-2018)

Identifiers

Cite

Mohammed Bouabdellaoui, Simona Checcucci, Thomas Wood, Meher Naffouti, Robert Paria Sena, et al.. Self-assembled anti-reflection coatings for light trapping based on SiGe random metasurfaces. Physical Review Materials, 2018, 2 (3), pp.035203. ⟨10.1103/PhysRevMaterials.2.035203⟩. ⟨hal-01788964⟩
256 View
321 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More