Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles

M. Acuautla 1 S. Bernardini 1 L. Gallais 2 T. Fiorido 1 L. Patout 1 Marc Bendahan 3
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ILM - ILM
FRESNEL - Institut FRESNEL
3 L2MP - Laboratoire matériaux et microélectronique de Provence
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https://hal-amu.archives-ouvertes.fr/hal-01790092
Contributor : Loïc Patout <>
Submitted on : Friday, May 11, 2018 - 4:21:22 PM
Last modification on : Monday, March 4, 2019 - 2:04:24 PM

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M. Acuautla, S. Bernardini, L. Gallais, T. Fiorido, L. Patout, et al.. Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles. Sensors and Actuators B: Chemical, Elsevier, 2014, 203, pp.602 - 611. ⟨10.1016/j.snb.2014.07.010⟩. ⟨hal-01790092⟩

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