Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles

Monica Acuautla (1) , S. Bernardini (1) , L. Gallais (2) , T. Fiorido (1) , L. Patout (1) , Marc Bendahan (3)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ILM - ILM
3 L2MP - Laboratoire matériaux et microélectronique de Provence

Domains: Chemical Sciences

Monica Acuautla, S. Bernardini, L. Gallais, T. Fiorido, L. Patout, et al.. Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles. Sensors and Actuators B: Chemical, 2014, 203, pp.602 - 611. ⟨10.1016/j.snb.2014.07.010⟩. ⟨hal-01790092⟩