Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles

Monica Acuautla (1) , S. Bernardini (1) , L. Gallais (2) , T. Fiorido (1) , L. Patout (1) , Marc Bendahan (3)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ILM - ILM
3 L2MP - Laboratoire matériaux et microélectronique de Provence

Domaines: Chimie

Monica Acuautla, S. Bernardini, L. Gallais, T. Fiorido, L. Patout, et al.. Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles. Sensors and Actuators B: Chemical, 2014, 203, pp.602 - 611. ⟨10.1016/j.snb.2014.07.010⟩. ⟨hal-01790092⟩