E. CourdouanAuthor
Edith Kussener 1AuthorPersonId : 173076 IdHAL : edith-kussenerORCID : 0000-0002-1670-9327IdRef : 069315094
L. GirodAuthor
J. GilbertAuthor
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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