On the increase of the controllability matrix rank in non-threaded run-to-run control

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Communication dans un congrès
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, France. IEEE, 〈10.1109/ASMC.2018.8373153〉
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https://hal-amu.archives-ouvertes.fr/hal-01893397
Contributeur : Taki Eddine Korabi <>
Soumis le : jeudi 11 octobre 2018 - 13:19:38
Dernière modification le : vendredi 12 octobre 2018 - 01:18:52

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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. On the increase of the controllability matrix rank in non-threaded run-to-run control. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, France. IEEE, 〈10.1109/ASMC.2018.8373153〉. 〈hal-01893397〉

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