Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. On the increase of the controllability matrix rank in non-threaded run-to-run control.
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, France. IEEE,
〈10.1109/ASMC.2018.8373153〉.
〈hal-01893397〉