A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing

Type de document :
Communication dans un congrès
2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME), Jul 2018, Prague, France. IEEE, 〈10.1109/PRIME.2018.8430365〉
Liste complète des métadonnées

https://hal-amu.archives-ouvertes.fr/hal-01893409
Contributeur : Taki Eddine Korabi <>
Soumis le : jeudi 11 octobre 2018 - 13:43:25
Dernière modification le : vendredi 12 octobre 2018 - 01:18:52

Identifiants

Citation

Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME), Jul 2018, Prague, France. IEEE, 〈10.1109/PRIME.2018.8430365〉. 〈hal-01893409〉

Partager

Métriques

Consultations de la notice

20