A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing

Taki Eddine Korabi 1, 2, 3 Guillaume Graton 1 El Mostafa El Adel 1 Mustapha Ouladsine 1 Jacques Pinaton 2
1 PECASE - Pronostic/Diagnostic Et CommAnde : Santé et Energie
LIS - Laboratoire d'Informatique et Systèmes
2 ST-ROUSSET - STMicroelectronics [Rousset]
3 LVR - Laboratoire Vision et Robotique
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Conference papers
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https://hal-amu.archives-ouvertes.fr/hal-01893409
Contributor : Taki Eddine Korabi <>
Submitted on : Thursday, October 11, 2018 - 1:43:25 PM
Last modification on : Tuesday, April 2, 2019 - 1:39:41 AM

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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME), Jul 2018, Prague, France. ⟨10.1109/PRIME.2018.8430365⟩. ⟨hal-01893409⟩

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