Journal articles
In-volume structuring of silicon using picosecond laser pulses
Abstract : We have demonstrated for the first time the permanent local modification of the bulk of silicon by repeated illumination with infrared (1.55 μm) picosecond pulses. Furthermore, we evaluated the characteristics of inscribing permanent modifications in the bulk material for different pulse durations from 0.8 to 10 ps in terms of their reproducibility and controllability of their morphology. Our results are based on a simple experimental setup that demonstrates the possibility of using picosecond pulses for the local modification of bulk silicon as a potential alternative to more complex irradiation strategies required for femtosecond pulse processing.
Cited literature [23 references]
https://hal-amu.archives-ouvertes.fr/hal-01917813
Contributor : David Grojo Connect in order to contact the contributor
Submitted on : Friday, November 9, 2018 - 5:00:09 PM
Last modification on : Thursday, November 18, 2021 - 9:48:07 AM
Long-term archiving on: : Sunday, February 10, 2019 - 3:12:23 PM
Contributor : David Grojo Connect in order to contact the contributor
Submitted on : Friday, November 9, 2018 - 5:00:09 PM
Last modification on : Thursday, November 18, 2021 - 9:48:07 AM
Long-term archiving on: : Sunday, February 10, 2019 - 3:12:23 PM
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Distributed under a Creative Commons Attribution 4.0 International License