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Atomic structures of Si() surface during silane UHV-CVD

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https://hal-amu.archives-ouvertes.fr/hal-01969091
Contributor : Laurence Masson <>
Submitted on : Thursday, January 3, 2019 - 4:28:29 PM
Last modification on : Friday, January 4, 2019 - 1:19:32 AM

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  • HAL Id : hal-01969091, version 1

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L. Masson, F. Thibaudau. Atomic structures of Si() surface during silane UHV-CVD. Surface Science, Elsevier, 2002, 504, pp.191-198. ⟨hal-01969091⟩

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