Highly selective ozone gas sensor based on nanocrystalline Zn0.95Co0.05O thin film obtained via spray pyrolysis technique

Yina Onofre , Ariadne Catto , Sandrine Bernardini (1) , Tomas Fiorido (1) , Khalifa Aguir (1) , Elson Longo (2) , Valmor R. Mastelaro (3) , Luís F da Silva (2) , Marcio P.F. Godoy

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 UFSCar - Universidade Federal de São Carlos [São Carlos]
3 IFSC - Grupo Crescimento de Cristais e Materiais Cerâmico

Chemiresistors are highly important for monitoring and detection of harmful gases produced from industrial processes and vehicle emissions. We report herein an experimental investigation of the gas-sensing properties of Zn0.95Co0.05O thin film deposited by spray pyrolysis technique. The X-ray photoelectron spectroscopy indicated the presence of Co2+ ions into de ZnO lattice. The gas-sensing measurements revealed the sensitivity of Zn0.95Co0.05O film towards ozone gas in a wide range of concentrations from 20 to 1040 ppb, exhibiting good repeatability and total reversibility after consecutive exposures. Selectivity towards ozone is observed in comparison to NO2, NH3, and CO gases even at low levels. This manuscript reports the effectiveness of spray-pyrolysis method for obtaining nanostructured Zn1-xCoxO thin films for practical applications as an ozone gas sensor.

Mots clés: ZnCoO; Spray pyrolysis; Chemiresistor; Ozone; gas sensor; Selectivity

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux

Yina Onofre, Ariadne Catto, Sandrine Bernardini, Tomas Fiorido, Khalifa Aguir, et al.. Highly selective ozone gas sensor based on nanocrystalline Zn0.95Co0.05O thin film obtained via spray pyrolysis technique. Applied Surface Science, In press, ⟨10.1016/j.apsusc.2019.01.197⟩. ⟨hal-01993778⟩