Role of the slow diffusion species in the dewetting of compounds: The case of NiSi on a Si isotope multilayer studied by atom probe tomography

T. Luo; Christophe Girardeaux; H. Bracht; Dominique Mangelinck

Journal articles

Role of the slow diffusion species in the dewetting of compounds: The case of NiSi on a Si isotope multilayer studied by atom probe tomography

T. Luo ¹ Christophe Girardeaux ¹ H. Bracht ² Dominique Mangelinck ¹

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

2 Institute of Materials Physics

Document type :

Journal articles

Domain :

Physics [physics] / Condensed Matter [cond-mat] / Materials Science [cond-mat.mtrl-sci]

Complete list of metadatas

https://hal-amu.archives-ouvertes.fr/hal-02044750
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 4:17:49 PM
Last modification on : Monday, December 14, 2020 - 3:08:15 AM

Role of the slow diffusion species in the dewetting of compounds: The case of NiSi on a Si isotope multilayer studied by atom probe tomography

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Role of the slow diffusion species in the dewetting of compounds: The case of NiSi on a Si isotope multilayer studied by atom probe tomography

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