Evolution of early formed NiSi2 during the reaction between Ni(W, Pt) films and Si (001)

T. Luo (1) , M. Bertoglio (1) , Christophe Girardeaux (1) , Dominique Mangelinck (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]

T. Luo, M. Bertoglio, Christophe Girardeaux, Dominique Mangelinck. Evolution of early formed NiSi2 during the reaction between Ni(W, Pt) films and Si (001). Micro and Nano Engineering, 2018, 1, pp.49-55. ⟨10.1016/j.mne.2018.10.004⟩. ⟨hal-02044789⟩