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Evolution of early formed NiSi2 during the reaction between Ni(W, Pt) films and Si (001)

T. Luo 1 M. Bertoglio 1 Christophe Girardeaux 1 Dominique Mangelinck 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02044789
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 4:19:44 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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T. Luo, M. Bertoglio, Christophe Girardeaux, Dominique Mangelinck. Evolution of early formed NiSi2 during the reaction between Ni(W, Pt) films and Si (001). Micro and Nano Engineering, Elsevier, 2018, 1, pp.49-55. ⟨10.1016/j.mne.2018.10.004⟩. ⟨hal-02044789⟩

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