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Combined effect of Pt and W alloying elements on Ni-silicide formation

T. Luo 1 Dominique Mangelinck 1 M. Descoins 1 M. Bertoglio 1 N. Mouaici A. Hallén Christophe Girardeaux 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02044799
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 4:22:52 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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T. Luo, Dominique Mangelinck, M. Descoins, M. Bertoglio, N. Mouaici, et al.. Combined effect of Pt and W alloying elements on Ni-silicide formation. Journal of Applied Physics, American Institute of Physics, 2018, 123 (12), pp.125301. ⟨10.1063/1.5020435⟩. ⟨hal-02044799⟩

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