Investigation of a new method for dopant characterization

J. Adrian 1 N. Rodriguez F. Essely 2 G. Haller 3 C. Grosjean A. Portavoce 4 Christophe Girardeaux 4
1 ELF Atochem
2 IMS - Laboratoire de l'intégration, du matériau au système
3 ST-ROUSSET - STMicroelectronics [Rousset]
4 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
Document type :
Journal articles
Complete list of metadatas
https://hal-amu.archives-ouvertes.fr/hal-02044987
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:10:02 PM
Last modification on : Saturday, February 23, 2019 - 1:22:13 AM

Identifiers

  • HAL Id : hal-02044987, version 1

Collections

UNIV-AMU | IMS-BORDEAUX-FUSION | IM2NP | IMS-BORDEAUX | UNIV-TLN

Citation

J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, Elsevier, 2007, 47 (9-11), pp.1599-1603. ⟨hal-02044987⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

95

Contact

CCSD