Investigation of a new method for dopant characterization

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https://hal-amu.archives-ouvertes.fr/hal-02044987
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:10:02 PM
Last modification on : Saturday, February 23, 2019 - 1:22:13 AM

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  • HAL Id : hal-02044987, version 1

Citation

J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, Elsevier, 2007, 47 (9-11), pp.1599-1603. ⟨hal-02044987⟩

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