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Evaluation of scanning capacitance microscopy sample preparation by focused ion beam

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https://hal-amu.archives-ouvertes.fr/hal-02044996
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:13:36 PM
Last modification on : Tuesday, March 30, 2021 - 3:23:29 AM

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  • HAL Id : hal-02044996, version 1

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N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, Christophe Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, Elsevier, 2006, 46 (9-11), pp.1554-1557. ⟨hal-02044996⟩

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