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Evaluation of scanning capacitance microscopy sample preparation by focused ion beam

N. Rodriguez J. Adrian 1 C. Grosjean G. Haller 2 Christophe Girardeaux 3 A. Portavoce 3 
1 ELF Atochem
2 ST-ROUSSET - STMicroelectronics [Rousset]
3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02044996
Contributor : Christophe Girardeaux Connect in order to contact the contributor
Submitted on : Thursday, February 21, 2019 - 5:13:36 PM
Last modification on : Tuesday, October 19, 2021 - 11:00:02 PM

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  • HAL Id : hal-02044996, version 1

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UNIV-TLN | CNRS | UNIV-AMU | IM2NP

Citation

N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, Christophe Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨hal-02044996⟩

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