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Evaluation of scanning capacitance microscopy sample preparation by focused ion beam

N. Rodriguez J. Adrian 1 C. Grosjean G. Haller 2 Christophe Girardeaux 3 A. Portavoce 3
1 ELF Atochem
2 ST-ROUSSET - STMicroelectronics [Rousset]
3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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Journal articles
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https://hal-amu.archives-ouvertes.fr/hal-02044996
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:13:36 PM
Last modification on : Saturday, February 23, 2019 - 1:22:13 AM

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  • HAL Id : hal-02044996, version 1

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UNIV-AMU | CNRS | IM2NP | UNIV-TLN

Citation

N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, Christophe Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, Elsevier, 2006, 46 (9-11), pp.1554-1557. ⟨hal-02044996⟩

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