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Sb Diffusion and Segregation in Amorphous Si Thin Films

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https://hal-amu.archives-ouvertes.fr/hal-02045010
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:22:04 PM
Last modification on : Tuesday, March 30, 2021 - 3:23:29 AM

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  • HAL Id : hal-02045010, version 1

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G. Lanza, J. Nyéki, Christophe Girardeaux, Z. Erdélyi, A. Csik, et al.. Sb Diffusion and Segregation in Amorphous Si Thin Films. Defect and Diffusion Forum, Trans Tech Publications, 2005, 237-240, pp.1246-1251. ⟨hal-02045010⟩

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