How to measure accurately mass transport in thin films by AES

Christophe Girardeaux (1, 2) , G. Clugnet (3) , Z. Erdélyi , J. Nyéki , J. Bernardini (2) , D. Beke , A. Rolland

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 L2MP - Laboratoire matériaux et microélectronique de Provence
3 IRC - Institut de recherches sur la catalyse

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]

Christophe Girardeaux, G. Clugnet, Z. Erdélyi, J. Nyéki, J. Bernardini, et al.. How to measure accurately mass transport in thin films by AES. Surface and Interface Analysis, 2002, 34 (1), pp.389-392. ⟨hal-02045033⟩