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How to measure accurately mass transport in thin films by AES

Christophe Girardeaux 1, 2 G. Clugnet 3 Z. Erdélyi J. Nyéki J. Bernardini 2 D. Beke A. Rolland
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 L2MP - Laboratoire matériaux et microélectronique de Provence
3 IRC - Institut de recherches sur la catalyse
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https://hal-amu.archives-ouvertes.fr/hal-02045033
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:37:40 PM
Last modification on : Tuesday, March 30, 2021 - 3:23:29 AM

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  • HAL Id : hal-02045033, version 1

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Christophe Girardeaux, G. Clugnet, Z. Erdélyi, J. Nyéki, J. Bernardini, et al.. How to measure accurately mass transport in thin films by AES. Surface and Interface Analysis, Wiley-Blackwell, 2002, 34 (1), pp.389-392. ⟨hal-02045033⟩

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