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Etching and functionalization of a fluorocarbon polymer by UV laser treatment

Christophe Girardeaux 1 Y. Idrissi J.J. Pireaux R. Caudano
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02045080
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Submitted on : Thursday, February 21, 2019 - 5:58:53 PM
Last modification on : Tuesday, March 30, 2021 - 3:23:29 AM

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  • HAL Id : hal-02045080, version 1

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Christophe Girardeaux, Y. Idrissi, J.J. Pireaux, R. Caudano. Etching and functionalization of a fluorocarbon polymer by UV laser treatment. Applied Surface Science, Elsevier, 1996, 96-98, pp.586-590. ⟨hal-02045080⟩

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