A low-energy electron point-source projection microscope not using a sharp metal tip performs well in long-range imaging

E. Salançon (1) , Alain Degiovanni (1) , Laurent Lapena (1) , Mehdi Lagaize (1) , Roger Morin (1)

1 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille

A low-energy electron point-source projection microscope that uses a metal/insulator structure as source instead of a sharp metal needle is presented. By combining this source with an electron optical lens and a high spatial resolution image detector, performances comparable to those of a normal electron projection microscope are easily accessible and presented here. The accessible electron energy range extends from 100eV to 1000eV. In the example presented here, instead of the usual near-field source-object distance, long-range imaging at a distance of about 600µm is achieved.

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Physique Quantique [quant-ph]

E. Salançon, Alain Degiovanni, Laurent Lapena, Mehdi Lagaize, Roger Morin. A low-energy electron point-source projection microscope not using a sharp metal tip performs well in long-range imaging. Ultramicroscopy, 2019, ⟨10.1016/j.ultramic.2019.02.022⟩. ⟨hal-02050666⟩