Hydro-carbon material design in a capacitively coupled radio-frequency discharge

Physics [physics] Physics [physics] Plasma Physics [physics.plasm-ph] Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

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https://hal-amu.archives-ouvertes.fr/hal-02110996

Submitted on : Thursday, April 25, 2019-4:46:34 PM

Last modification on : Wednesday, November 3, 2021-6:41:31 AM

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hal-02110996 , version 1 (25-04-2019)

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HAL Id : hal-02110996 , version 1
DOI : 10.1002/ppap.201700152

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Slobodan Mitic, Stéphane Coussan, Céline Martin, Lénaïc Couëdel. Hydro-carbon material design in a capacitively coupled radio-frequency discharge. Plasma Processes and Polymers, 2018, 15 (3), pp.1700152. ⟨10.1002/ppap.201700152⟩. ⟨hal-02110996⟩

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