A Noise Spectroscopy-Based Selective Gas Sensing with MOX Gas Sensors

S. Gomri (1) , J. Seguin (2) , T. Contaret (2) , T. Fiorido (2) , Khalifa Aguir (2)

1 ENIS - École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Communicated by Zoltan Gingl We propose a new method for obtaining a °uctuation-enhanced sensing (FES) signature of a gas using a single metal oxide (MOX) gas micro sensor. Starting from our model of adsorption-desorption (A-D) noise previously developed, we show theoretically that the product of frequency by the power spectrum density (PSD) of the gas sensing layer resistance °uctuations often has a maximum which is characteristic of the gas. This property was experimentally con¯rmed in the case of the detection of NO 2 and O 3 using a WO 3 sensing layer. This method could be useful for classifying gases. Furthermore, our noise measurements con¯rm our previous model showing that PSD of the A-Dnoise in MOX gas sensor is a combination of Lorentzians having a low frequency magnitude and a cut-o® frequency which depends on the nature of the detected gas.

Keywords: Metal oxide gas micro sensor; adsorption-desorption noise; °uctuation-enhanced sensing; noise spectroscopy; gas sensor selectivity

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

S. Gomri, J. Seguin, T. Contaret, T. Fiorido, Khalifa Aguir. A Noise Spectroscopy-Based Selective Gas Sensing with MOX Gas Sensors. Fluctuation and Noise Letters, 2018, 17 (02), pp.1850016. ⟨10.1142/S0219477518500165⟩. ⟨hal-02114914⟩