Optimisation of Fluorinated and Phosphorus acids stream treatment from Microelectronic industry

Kelly Ohanessian (1) , Cristian Barca (1) , Jean-Henry Ferrasse (1) , Olivier Boutin (1) , Audrey Soric (1)

1 M2P2 - Laboratoire de Mécanique, Modélisation et Procédés Propres

The treatment of fluorinated and phosphorus acid microelectronic stream was studied by physiochemical simulations by ProSimPlus software. The conventional treatment is carry out and new systems are proposed. The precipitations of CaF2, NH4MgPO4.6H2O (Struvite) and Ca5(PO4)3OH (Hydroxyapatite) are involved. Using calcium hydroxide as carbon source and pH regulation for the precipitation of CaF2 can reduce chemical consumption more than 60%. For the Stuvite precipitation, about 2,4 t/d can be recover but the effluent quality at the end is not very clean because 150 mg/L of NH4OH is still present. Finally, the second optimization way allows to recover about 1,6 t/d of Hydroxyapatite but ammonium but be removed.

Domains: Engineering Sciences [physics]; Chemical and Process Engineering

Kelly Ohanessian, Cristian Barca, Jean-Henry Ferrasse, Olivier Boutin, Audrey Soric. Optimisation of Fluorinated and Phosphorus acids stream treatment from Microelectronic industry. 21st Conference on Process Integration, Modelling and Optimisation for Energy Saving and Pollution Reduction, Aug 2018, Prague, Czech Republic. ⟨hal-02116870⟩